EBeam Device Enhances Microelectronics Research at HKUST

Abstract

[evdate 1995-05-22] For Immediate Release 22 May 1995 EBeam Device Enhances Microelectronics Research at HKUST The Microelectronics Fabrication Centre (MFC) of the Hong Kong University of Science and Technology announces the installation of a sophisticated device for

Electron Beam Lithography (EBeam) which will enhance Hong Kong's research capability in a field critical to its economy. Presiding at the inaugural ceremony held this afternoon (22 May) were Dr Horst Wegener, President of Leica Microscopy, and Professor Chia-Wei Woo, President of the University. The EBeam device generates an ultra-fine electron beam that can inscribe patterns for electronic circuitry with lines below 0.1 micron (about l/ 1000th of the

diameter of a human hair) in width. An indispensable tool in nanotechnology development, the EBeam makes possible the fabrication of 1 Gbyte DRAM memory chips for computers, as well as the micro motors used in micro-machine technology.

With the installation of the EBeam, HKUST's Microelectronics Fabrication Centre has further solidified its position as one of the outstanding academic centres

for microelectronics technology. "The MFC supports research related to electrical and electronic engineering, mechanical engineering, physics and many other disciplines," says Dr Tai-Chin Lo,

Director of MFC. "We have established links with academic institutions in the Chinese Mainland and Taiwan, and projects such as the development of new integrated circuits for mobile telephones are underway." The Swiss Leica Group is one of the largest suppliers of inspection and measuring instruments in the world. The EBeam EBML300 at the HKUST was designed and assembled at Leica Cambridge, a subsidiary of Leica founded in 1881 by

Horace Darwin, son of Charles Darwin. (Direct enquiries to the Office of Public Affairs at 2358 6320 or pager 1163388 call 2652)